发明名称 Detecting short-circuits between memory cells on wafer by measuring conductivity between contacted conductive tracks
摘要 The method involves contacting adjacent memory cells (2) via separate, spaced-apart conductive tracks (1), and then measuring the conductivity between the tracks. A pair of memory cells may be contacted to a predetermined number of parallel, spaced-apart conductive tracks. An Independent claim is included for a circuit device.
申请公布号 DE10044537(A1) 申请公布日期 2002.03.14
申请号 DE20001044537 申请日期 2000.09.05
申请人 INFINEON TECHNOLOGIES AG 发明人 GERSTMEIER, GUENTER;MUTSCHALL, DORIS;RICHTER, FRANK;ROSSKOPF, VALENTIN;SEITZ, HELMUT
分类号 G11C29/02;G11C29/50;H01L21/8242;H01L27/105;(IPC1-7):H01L21/66;H01L27/115;G11C29/00 主分类号 G11C29/02
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