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发明名称
Cvd coating device
摘要
申请公布号
AU9179701(A)
申请公布日期
2002.03.13
申请号
AU20010091797
申请日期
2001.08.24
申请人
AIXTRON AG
发明人
HOLGER JURGENSEN;JOHANNES KAPPELER;GERD STRAUCH
分类号
C23C16/458;C30B25/12;H01L21/205
主分类号
C23C16/458
代理机构
代理人
主权项
地址
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