发明名称 |
MEASURING POSITIONS OR COPLANARITY OF CONTACT ELEMENTS OF AN ELECTRONIC COMPONENT WITH A FLAT ILLUMINATION AND TWO CAMERAS |
摘要 |
A method and an apparatus for measuring respective positions of a set of contact elements of an electronic component, wherein the contact elements are illuminated with a light source producing a light with an incident angle of at the most 20° and wherein a first respectively a second image is recorded of said elements by means of a first respectively a second camera which are set up over a triangulation angle with respect to each other. |
申请公布号 |
EP1185841(A1) |
申请公布日期 |
2002.03.13 |
申请号 |
EP20000907364 |
申请日期 |
2000.03.01 |
申请人 |
ICOS VISION SYSTEMS N.V. |
发明人 |
SMETS, CARL;VAN GILS, KAREL;VAN DER BURGT, MAARTEN |
分类号 |
G01B11/03;G01B11/30;G01N21/88;G06T7/00;G06T7/60;H01L21/66;H05K13/08 |
主分类号 |
G01B11/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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