MICRO-MIRROR ARRAY, FABRICATING METHOD THEREOF, AND OPTICAL SWITCH THEREOF

摘要

PURPOSE: A micro-mirror array, a fabricating method thereof, and an optical switch thereof are provided to control an optical path of a laser beam on a free space by using a drive micro-mirror array arranged on the same two-dimensional plane. CONSTITUTION: An optical switch is used for controlling an optical path between a bundle of inputted optical fiber and a bundle of outputted optical fiber. The optical switch is formed with a multitude of micro-mirrors(101), an x-axis driver, a y-axis driver, and a gimbal. The x-axis driver is used for rotate and drive each micro-mirror(101) to an x-axis direction. The y-axis driver is used for rotate and drive each micro-mirror(101) to a y-axis direction. The gimbal is used for controlling the x-axis direction movement and the y-axis direction movement of each micro-mirror(101), independently. The x-axis driver and the y-axis driver are formed by a piezoelectric driver.