发明名称 Method and apparatus for mounting semiconductor chips
摘要 During the mounting of a semiconductor chip (1) on a substrate with a portion of adhesive (5), a bonding head (3) is lowered at a pre-defined height (H) over a support (6) holding the substrate. A gripper (2) is fixed on the bonding head in an upper end position. As soon as the bonding head reaches the height, the gripper is released to move down and press the chip onto the adhesive. After a preset time the bonding head lifts up after loosening the gripper.
申请公布号 EP1187180(A1) 申请公布日期 2002.03.13
申请号 EP20000810820 申请日期 2000.09.12
申请人 ESEC TRADING S.A. 发明人 LEU, FELIX
分类号 H01L21/52;H01L21/00;H01L21/58 主分类号 H01L21/52
代理机构 代理人
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