发明名称 POSITIONING DEVICE
摘要 The invention relates to a positioning device (100) with a positioning drive (103), comprising in particular, a piezoceramic actuator, a positioning sensor (105) and a control device (107-115) for the positioning drive which is connected on the input side to a control-signal input unit (101) and to the positioning sensor in a closed loop. The control device is designed for outputting pre-configured control signals to the positioning drive, whereby the control device has a controllable filter (109) which has modifiable filter co-efficients and which is connected to a filter-co-efficient calculation unit (115) via a control input. The filter co-efficient calculation unit is connected to the control-signal input unit via a first input and at least to the positioning sensor via a second input and calculates the current filter co-efficients from predetermined position-control signals (X[n]) which have been input and from position signals (S[n]) which have been detected in real time.
申请公布号 EP1186061(A1) 申请公布日期 2002.03.13
申请号 EP20000920673 申请日期 2000.04.06
申请人 PHYSIK INSTRUMENTE (PI) GMBH & CO. 发明人 KOHLER, RAINER
分类号 H01L41/04;H02N2/06 主分类号 H01L41/04
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