发明名称 |
Piezoelectric/electrostrictive element |
摘要 |
<p>A ceramic substrate 1 comprises a thin diaphragm portion 3 and a thick portion 2. A lower electrode 4 is formed on the ceramic substrate and is spaced apart from an auxiliary electrode 8, also formed on the ceramic substrate. A bonding layer 7C comprises an insulator and is formed on the ceramic substrate between the lower and auxiliary electrodes. A piezoelectric/electrostrictive layer 5 is formed on at least a portion of each of the lower electrode, the auxiliary electrode and the bonding layer. An upper electrode 6 extends over the piezoelectric/electrostrictive layer and contacts the auxiliary electrode. A bonded portion exist wherein the bonding layer serves to completely bond together the substrate and the piezoelectric/electrostrictive film layer. <IMAGE></p> |
申请公布号 |
EP1187234(A2) |
申请公布日期 |
2002.03.13 |
申请号 |
EP20010307651 |
申请日期 |
2001.09.10 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
YAMAGUCHI, HIROFUMI;TAKAHASHI, NOBUO |
分类号 |
G01P15/09;B81C1/00;H01L41/09;H01L41/187;H02N2/00;(IPC1-7):H01L41/08 |
主分类号 |
G01P15/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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