| 摘要 |
Systems and methods are described for field emission devices having carbon nanofiber emitters. A method, includes: providing a substrate; depositing a catalyst, the catalyst coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming a dielectric well in the dielectric layer to uncover at least a portion of the catalyst; and then fabricating a carbon containing tip i) having a base located substantially at the bottom of the dielectric well and ii) extending substantially away from the substrate. An apparatus, includes: a substrate; an electrode structure coupled to the substrate, the electrode structure including a dielectric layer coupled to the substrate, the dielectric layer including a dielectric well that is formed in the dielectric layer after the dielectric layer is deposited; and an extractor layer coupled to the dielectric layer, the extractor layer including an extractor aperture; and a carbon containing tip coupled to the substrate, the carbon containing tip having a base located substantially at a bottom of the dielectric well and extending substantially away from the substrate, the carbon containing tip being grown from the bottom of the dielectric well using a catalyst that is introduced at the bottom of the dielectric well after the dielectric well is formed. A method, includes: providing a substrate on a heater plate in a vacuum chamber; providing a carbon source gas and an etchant gas; heating the substrate with the heater plate; and then fabricating a carbon tip on the substrate with the carbon source gas and the etchant gas using plasma enhanced chemical vapor. |
