发明名称 |
Apparatus for positioning a thin plate |
摘要 |
A positioning apparatus includes: a stage having a flat placement surface on which a thin plate is mounted. The placement surface has a flat region which is slightly larger than and completely covers that of said thin plate. The placement surface also has lateral side edges. An optical detecting means is arranged above the stage for detecting a mark provided on the thin plate and has such a view that the mark can be caught by the view if the thin plate placed on the placement surface is within the flat region, but the mark cannot be caught by the view if the thin plate placed on the placement surface protrudes by a part thereof from the region of the placement surface. A movable part pushes the thin plate until it comes into contact with the lateral edge to move the thin plate so that the thin plate is brought within the flat region of the placement surface.
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申请公布号 |
US6354480(B2) |
申请公布日期 |
2002.03.12 |
申请号 |
US20010778119 |
申请日期 |
2001.02.05 |
申请人 |
SHINKO ELECTRIC INDUSTRIES, CO., LTD |
发明人 |
HIGASHI MITSUTOSHI;KOIKE HIROKO |
分类号 |
H01L21/68;(IPC1-7):B23Q16/12;B23K31/02;B23K37/04 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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