| 摘要 |
PROBLEM TO BE SOLVED: To three-dimensionally display the result of a device simulation in a semiconductor production process at a high speed in a three-dimensional graphic depiction device. SOLUTION: This device comprises a device A1 for reading, from a data file 10, analysis element information on a plurality of three-dimensional discretizing elements used for simulation, an element list preparing device A2 for preparing element list for each node of the plurality of three-dimensional discretizing elements, an adjacent information preparing device A3 for preparing, based on the element list, the adjacent element information showing the adjacent state of the plurality of three-dimensional discretizing elements, an external information extracting device A4 for extracting, based on the adjacent element information, the external surface, corresponding to the shape of an object to be simulated, and a display device A5 for graphically displaying the extracted external surface on a display 14.
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