SCANNER, SCAN METHOD AND NON-CONTACT TYPE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a two-dimensionally scanning mechanism capable of simulta neously scanning a wide range of >=180 deg. in a horizontal direction and a wide range of >=90 deg. in a perpendicular direction. SOLUTION: A shaft 1 is rotated by a motor part and it is vertically operated by generating reciprocating movement by a linear motion generating means such as a voice coil motor or a linear motor. A beam 43 from a laser diode 41 is reflected by a reflector 20 to emit an emitted beam 44. A retroreflection beam 45 reflected by an object not shown in the figure is reflected by a reflector 21 and it is received by a photoelectric transducing element 47. An X-axis direction (the horizontal direction) is scanned by synchronizing the reflectors 20 and 21 and rotating the emitted beam 44 and the recurrent beam 45 by the shaft 1 and a Y-axis direction (the perpendicular direction) is scanned by the vertical reciprocating movement of the shaft 1. In such manner, a substantial scanning range can be scanned.