| 摘要 |
According to the invention, a variable power laser beam delivery apparatus is provided. The apparatus includes a generator for delivering a preselected wavelength beam preferably an ultraviolet (UV) beam along a beam path. A dichroic mirror, desirably two (2) or more preferably four (4) dichroic mirrors, for transmitting the preselected UV wavelength beam at P-polarization and for highly reflecting the preselected UV wavelength beam at S-polarization are located along the preselected wavelength beam path delivered from the laser beam generator. A beam polarization rotator is mounted along the beam path of the laser beam provided from the laser beam generator. The beam polarization rotator is located between the laser beam generator and the dichroic mirror along the laser beam path. A beam output is provided by directing the beam transmitted by the dichroic mirror or reflected by the dichroic mirror to a preselected location as the output of the device. Alternatively when two beam outputs are desired, both the reflected and the transmitted beam can be used as laser beam outputs.
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