TIMING CORRECTION CIRCUIT, TIMING CORRECTION METHOD AND SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To correct the shift between a set-up time at the rising of an output signal waveform and a set-up time in falling. SOLUTION: By performing level adjustment by lowering the level of a comparing signal Sp shown by a fine line I byΔV as shown by a thick line III, the rising timing of the comparing signal Sp is delayed byΔt and the falling timing thereof is accelerated byΔt to equalize the rising required time t3 (=t1+Δt) at the time of rising of an output signal OUT 1 and the falling required time t4 (=t2-Δt) at the time of falling thereof.