| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of regenerating a color filter substrate enabling to reuse the substrate even when the color filter substrate turns into a defective product due to a defect or the like generated in a color filter layer by easily releasing the color filter layer in which a defect or the like is generated from the color filter substrate. SOLUTION: In forming the color filter layer 14 on an upper layer part of a semiconductor substrate 10 via an acrylic thermosetting resin layer 12, a defect 20 or the like is sometimes generated inside the color filter layer 14 and the color filter substrate 16 turns into the defective product. In this case the acrylic thermosetting resin layer 12 is decomposed by heat treatment at a temp. of 250-350 deg.C for 150-200 minutes, then is subsequently subjected to chemical treatment using a mixed liquid of hydrazine hydrate and ethylenediamine and is released from the semiconductor substrate 10. Thereby, the color filter layer 14 in which the defect 20 or the like is generated is easily released.</p> |
