ELEMENT SUBSTRATE AND INSPECTION METHOD AND INSPECTION DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an inspection method which permits confirming whether a prescribed voltage can be applied to the pixel electrode of each pixel before an EL element is formed without destroying a formed semiconductor element or not. SOLUTION: In order to nondestructively inspect whether the semiconductor element formed on a pixel part of the element substrate operates or not, the element substrate and a counter detection electrode are immersed into an electrolyte, the value of electric current that flows between the pixel electrode on the element substrate and the counter detection electrode is measured and, thereby, the normal/defective condition of the element substrate is decided.