| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar-type chemical concentration measuring instrument capable of more accurately measuring the two-dimensionally distributed concentration of a chemical substance. SOLUTION: This planar-type chemical concentration measuring instrument is equipped with a planar sensor 1 comprising a sensor array sensing the chemical substance. The planar sensor 1 is provided with a plurality of holes 4 vertically bored therein. Unit sensors 2 constituting the sensor array are each adapted to face on the periphery of a hole 4 or on the hole 4, thus detecting the concentration of the chemical substance passing through each of the holes 4. |
