发明名称 EXPOSURE METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide an exposure method which does not to give rise to the contamination, damage, etc., of raw glass without prolonging the exposure time even if a lot of patterns is formed by forming the shapes and positions of patterns with good accuracy in exposure when the fine patterns are formed on a cylinder surface by a photolithographic method. SOLUTION: The UV rays from a light source 11 of a long-sized shape are exposed to a photoresist film 31 disposed on the cylinder surface through a photomask 20 while the cylinder 30 surface and a photomask surface 21 are held in a proximity state.</p>
申请公布号 JP2002072497(A) 申请公布日期 2002.03.12
申请号 JP20000258916 申请日期 2000.08.29
申请人 TOPPAN PRINTING CO LTD 发明人 NAGANO KATSUICHI;SUKUNAMI TOMOYUKI;MATSUMOTO YASUAKI;MITSUIDA ATSUSHI
分类号 G03F1/88;G03F7/20;G03F7/24;(IPC1-7):G03F7/24;G03F1/02 主分类号 G03F1/88
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