发明名称 METHOD FOR CORRECTING DEFECT IN METALLIC FILM AND DEVICE THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for correcting a defect in a metallic film by which the adhesion of a modifying film to glass can reliably be carried out when the defective part of a metallic film is modified by baking a mending liquid and to provide a device therefor. SOLUTION: A metallic sheet 23 is disposed opposite to a mending liquid 20 dropped on a defective part 17 and the sheet 23 is heated by irradiation with laser beam B to bake the mending liquid 20. The temperature of the melding liquid 20 is sufficiently raised even when the liquid 20 is dropped on a glass part of the defective part 17.</p>
申请公布号 JP2002072449(A) 申请公布日期 2002.03.12
申请号 JP20000267699 申请日期 2000.09.04
申请人 TOKYO PROCESS SERVICE KK 发明人 SOMEYA SUSUMU
分类号 G03F1/72;H01L21/027;(IPC1-7):G03F1/08 主分类号 G03F1/72
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