发明名称 |
METHOD FOR CORRECTING DEFECT IN METALLIC FILM AND DEVICE THEREFOR |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for correcting a defect in a metallic film by which the adhesion of a modifying film to glass can reliably be carried out when the defective part of a metallic film is modified by baking a mending liquid and to provide a device therefor. SOLUTION: A metallic sheet 23 is disposed opposite to a mending liquid 20 dropped on a defective part 17 and the sheet 23 is heated by irradiation with laser beam B to bake the mending liquid 20. The temperature of the melding liquid 20 is sufficiently raised even when the liquid 20 is dropped on a glass part of the defective part 17.</p> |
申请公布号 |
JP2002072449(A) |
申请公布日期 |
2002.03.12 |
申请号 |
JP20000267699 |
申请日期 |
2000.09.04 |
申请人 |
TOKYO PROCESS SERVICE KK |
发明人 |
SOMEYA SUSUMU |
分类号 |
G03F1/72;H01L21/027;(IPC1-7):G03F1/08 |
主分类号 |
G03F1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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