SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, ITS MANUFACTURING METHOD AND LIQUID CRYSTAL DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To prevent the discharge of gas effectively and at the same time make it excellent in adhesion. SOLUTION: An organosilicon film 2 is formed by applying a prescribed organosilicon compound and its hydrolysate to the whole resin substrate 1 with a dipping method, then SiO2 is deposited on the whole organosilicon film 2 by immersing the resin substrate 1 into H2SiF6 solution of which SiO2 is made in the saturated state, and an SiO2 film 3 containing an Si-OH group is formed, then an ITO film 4 is laminated on the surface of the SiO2 film 3 by an arc discharge ion plating method or a sputtering method.