发明名称 Deriving statistical device models from worst-case files
摘要 A set of worst-case device model files is provided for a production process used to mass-produce integrated circuits having a plurality of primitive device model types. A statistical device model for the production process is derived directly from the worst-case files.
申请公布号 US6356861(B1) 申请公布日期 2002.03.12
申请号 US19990291157 申请日期 1999.04.12
申请人 AGERE SYSTEMS GUARDIAN CORP. 发明人 SINGHAL KUMUD;VISVANATHAN V.
分类号 H01L21/66;G01R31/01;G06F17/18;G06Q10/00;H01L21/02;(IPC1-7):G06F17/50 主分类号 H01L21/66
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