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发明名称
摘要
申请公布号
JP3264260(B2)
申请公布日期
2002.03.11
申请号
JP19980371415
申请日期
1998.12.25
申请人
发明人
分类号
H01L21/82;G06F17/50;(IPC1-7):H01L21/82
主分类号
H01L21/82
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代理人
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