PRESSURE PRODUCER AND TURBO-MOLECULAR PUMP

摘要

PROBLEM TO BE SOLVED: To provide a pressure producer equipped with balanced radial roller bearing having superb rigidity and stability and a turbo-molecular pump. SOLUTION: This pressure producer generates negative or positive pressure in such a way that it discharges the working fluid to the one direction by the rotating of blades 5, 19. This pressure producer is equipped with an air bearing to control the movement of radial direction of a rotating shaft 14. The air bearing is equipped with plural rows of strip-like dynamic pressure producing area 41a, 41b forming V type dynamic pressure grooves along the direction of outer circumferential surface of cylinder 25. The region crook 43a of dynamic pressure groove 43 in the dynamic pressure producing area 41a located at the most outside is in place deviating the line from the center C1 of dynamic pressure producing area 41a to the roller bearing.