PLASMA RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma-resistant member and a method for manufacturing the member which sufficiently endures against plasma exposure and which reduces the cost. SOLUTION: In the plasma-resistant member, at least the surface region to be exposed to plasma in a corrosive gas environment consists of a yttrium oxide sintered compact. The yttrium oxide sintered body is a complex sintered compact with yttrium aluminate and contains the yttrium aluminate by 0.1 to 10 mass% as the outer percentage calculated by the quantitative analysis of an aluminum element. Preferably, the yttrium oxide sintered compact has <=2% porosity and <=2.5 surface center line average roughness (Ra).