PLASMA RESISTANT MEMBER AND METHOD OF MANUFACTURING FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant member of a low cost type having high plasma resistance and excellent mechanical strength, such as bending strength and toughness and a method for manufacturing the same. SOLUTION: This plasma resistant member has a base material 13 consisting substantially of a sintered ceramic compact and a yttrium aluminum-garnet layer 14 of >=2 μm in thickness with which the surface of the base material 13 is melt coasted. This manufacturing method comprises the steps of providing the surface of a ceramic molding with a layer containing yttrium aluminum- garnet particles and heating the ceramic molding provided with the layer containing yttrium aluminum-garnet particles to sinter the ceramic particles and melting the yttrium aluminum-garnet particles to form a coating layer.