| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a secondary ion mass spectrometry in which the charge storage due to primary ions does not occur, secondary ions can be generated easily, and then, by which accurate and high-accuracy elemental analysis can be performed easily. SOLUTION: At the time of performing elemental analysis on a solid sample by using secondary ions which are discharged from the sample when the sample is irradiated with primary ions, a current collecting section is provided by burying a conductive material closely to the area to be analyzed of the sample. At the same time, the elemental analysis is performed by using the secondary ions discharged from the area to be analyzed by simultaneously irradiating the area and current collecting section with one spatially continuous primary ion beam.</p> |
