| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive displacement sensor, capable of reducing the size of the direction of displacement detection. SOLUTION: A rod-shaped probe 16, provided with a stylus 20 at the tip, is rockably supported with a fulcrum 18 as its center. A circular movable electrode 22 is mounted to the base end of the probe 16, and both ends of the movable electrode 22 are each inserted in circularly bent tubular fixed electrodes 24A and 24B. When the stylus 20 is displaced, the probe 16 is rocked according to the amount of the displacement. As a result, the movable electrode 22 is moved in the fixed electrodes 24A and 24B to change capacitances CA and CB, each being formed between the fixed electrodes 24A and 24B. The difference between the two capacitances CA and CB is detected as a differential output, and the amount of displacement of the stylus is detected, on the basis of the differential output.
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