| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrostatic gas bearing spindle in which a rotating shaft 7 is supported in the bearing housing 5 by compressed gas, and which is suitable to be used in a vacuum in particular with sufficiently low external leakage of bearing exhaust. SOLUTION: In the hydrostatic gas bearing spindle wherein a rotating shaft 7 is provided in housings 5, 6 across the bearing clearance and the rotating shaft 7 is supported non-contact against the housing 5, 6 by introducing the compressed gas to the bearing clearance, a plurality of negative pressure generators 23 which generates negative pressure within the housings 5, 6 or the rotating shaft 7 by the flowing of the compressed gas are provided, and by absorbing the gas discharged from the bearing clearance by the negative pressure generator 23, an amount of bearing exhaust drained to a vacuum chamber can be restrained and a vacuum arrival degree of the vacuum chamber can be raised, as compared with the case of single unit negative pressure generator 23.
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