PLASMA RESISTANT QUARTS GLASS-MADE FIXTURE

摘要

PROBLEM TO BE SOLVED: To provide a fixture free from abnormal etching or generation of particles even when used in an apparatus of generating a plasma, and excellent in plasma etching characteristic. SOLUTION: This plasma resistant quarts glass-made fixture used in the apparatus of generating the plasma has a surface roughness Ra of 5-0.05μm of the quarts glass surface and 0 or 1 of the content of bubbles in the glass in terms of foam grade by DIN, and has no micro cracking layer on the surface.