| 摘要 |
PURPOSE: A wafer prober having a cleaning function is provided to easily and simply eliminate particles on a probe card and a needle, by making a conventional wafer prober system and a laser cleaning system formed in one body. CONSTITUTION: A probe card holder(53) fixes the probe card(51). A wafer chuck(55) supports a wafer, installed under the probe card holder. A transfer unit(57,59) vertically and horizontally transfers the wafer chuck, supporting the wafer chuck. A needle align camera(61) aligns the position of the needle(51') of the probe card, installed in one side of the wafer chuck. A laser generating unit(63) irradiates laser toward the needle to eliminate the particles on the probe card and the needle, installed in the other side of the wafer chuck.
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