| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for efficiently producing a high quality carbon nanotube at a low temperature of about 500-850 deg.C under low pressure of 10-4-10-1 Pa without applying any electrical field. SOLUTION: This method for producing a carbon nanotube comprises introducing a gaseous carbon-containing material into a plasma generating chamber in which inside pressure is held at a level of 10-4-10-1 Pa, a microwave is introduced, and further, a magnetic field is applied to the microwave, generating a electronic cyclotron resonance plasma of the carbon-containing material, bringing the plasma into contact with a substrate which is held at a temperature of 500-850 deg.C, and depositing the carbon nanotube on the substrate in the vertical direction. |
