METHOD FOR SUPPLYING HIGH CONCENTRATION OZONE GAS AND ITS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for supplying a high concentration ozone gas and its apparatus, which can supply the high concentration ozone gas stably, even to a small-scale ozone consumption apparatus. SOLUTION: This method comprises an adsorption process for carrying out the saturated adsorption of ozone gas that is generated by an ozone generator (6) to an adsorbent (1) that is cooled by a refrigerator (2) at an atmospheric pressure condition, a purification process for decompressing to exhaust the interior of an adsorption tube (2) storing the adsorbent (1) to a partial pressure of the supplied ozone gas, and a desorption process which supplies the high concentration ozone at a predetermined flow by a pressure difference due to connecting the adsorption tube (2) whose inside is kept at a cooling and a decompression condition with the ozone consumption apparatus that is kept at an vacuum condition.