| 摘要 |
PROBLEM TO BE SOLVED: To diminish the generation of dust by effectively preventing spalling and falling of re-coated material, which is adhered and piled between a peripheral target body and a target hold-down jig in a sputtering target. SOLUTION: This sputtering target is equipped with a target body 11 having a step part 13 in peripheral side, a packing plate 12 supporting a lower side of this target body 11, and a target hold-down jig 14, laid out outside of peripheral target body 11, holding the step face 13a of the step part 13 of the target body 11. A concave dust-suppressing part 17 is formed on the step face 13a of the step-wise part 13 installed in the peripheral target body 11, or is formed on the differential step face 13b of this step part 13.
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