| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal infrared detector which can control the drift of output from the detector caused by environmental temperature and/or the self-heating of the elements in the detector without a temperature controller such as a Peltier element and can be improved in its sensitivity by increasing the numerical aperture. SOLUTION: A first and a second temperature detecting parts 5a and 5b, respectively, are formed in each pixel composing an array. Bolometer thin films 7 are suspended by beams 6 so that the temperature detecting parts 5a and 5b are thermally separated from a substrate. Eaves 4 are projected from both ends of the first temperature detecting part 5a to the outside so that they are out of contact with the beams 6 and the second temperature detecting part 5b. An infrared reflecting film 12 is formed on the second temperature detecting part 5b to make the heat capacities of the film 12 and the eaves 4 approximately equal so that the influence from the temperature change arises from the environmental temperature and/or the self-heating to the both detecting parts 5a and 5b is canceled and only a signal of an incident infrared ray on the first temperature detecting part 5a and the eaves 4 are extracted.
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