| 摘要 |
PURPOSE: A projection exposure device serving to produce an image of an object in an image plane positioned in an object plane is provided, to allow a distribution of predetermined lighting angles to be set exactly. CONSTITUTION: The projection exposure device has filter elements(22, 22') are has a transmission factor greater than 0% and smaller than 100% at least at a specific range(24) for the transmitted light. The transmission factor of the filter elements(22, 22') is nonrotation symmetrical via a filter face concerning a light axis(14) of the projection optical device and the filter elements(22, 22') are maintained to be rotated around the light axis(14). Preferably the filter has at least one filter elements having a transmission factor and the transmission factor is changed to the radius diameter to the light axis(14). The filter element(22') is moveable in the filter face and has a distribution of the transmission factor over the filter face, to allow the intensity distribution of the projection light perpendicular to the optical axis(14) in the ray path after the filter to be changed with the movement of the filter element(22').
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