发明名称 |
CLEANING OF SEMICONDUCTOR PROCESS EQUIPMENT CHAMBER PARTS USING ORGANIC SOLVENTS |
摘要 |
A system and method are provided for using an organic solvent to clean chamber parts used in semiconductor manufacturing. The chamber parts are exposed to the solvent using a dipping system or a vapor contact system in order to soften or dissolve the organic polymers. The solvent may be heated up to a temperature of 100 DEG C. The organic cleaning solvent may be a pyrrole-based, amine-based, fluoro/ether-based or ether-based solvent. Additionally, a system and method are provided for establishing criteria to verify that the chamber parts are clean with respect to organic, metallic and particulate impurities and establishing criteria to verify that the physical surface morphology remains intact. |
申请公布号 |
WO0219390(A2) |
申请公布日期 |
2002.03.07 |
申请号 |
WO2001US27247 |
申请日期 |
2001.08.31 |
申请人 |
CHEMTRACE, INC.;TAN, SAMANTHA;CHEN, NING |
发明人 |
TAN, SAMANTHA;CHEN, NING |
分类号 |
B08B1/02;B08B3/00;B08B3/04;B08B5/04;C23C16/44;C23G1/02;C23G5/00;C23G5/02;C23G5/028;C23G5/036;H01L |
主分类号 |
B08B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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