发明名称 Scrubber washing polishing slurry from wafer using de-ionized water, has upper and lower, mirror-symmetrical gear boxes driving brushes sandwiching wafer
摘要 Scrubber casing comprises; motor sealed against wash fluid with drive shaft perpendicular to the top surface; sealed gearbox including gear wheel driving shaft connected to mounting disc, into which brush can be inserted; lower mirror-symmetrical gear casing with encapsulated lower gear box, aligned with the upper box, between them, upper and lower, coaxial mounting discs are fitted with brushes. At one end of the scrubber casing (1) top (3), a motor (2) encapsulated against wash fluid has a drive shaft (8) perpendicular to the top surface. An encapsulated gearbox (4) in the upper casing includes a gear wheel (5) driving a shaft (6) connected to a mounting disc (7) parallel to the top, into which a brush can be inserted. A lower mirror-symmetrical gear casing (11) with an encapsulated lower gear box (12), is located in precise alignment with the upper box. Between them, are upper and lower, coaxial mounting discs (7, 15) fitted with brushes. Upper and lower rotary disc and brush assemblies together form a brush unit, between which part of the wafer can be sandwiched, for cleaning. A drive shaft (8) coupling extends into the lower gear box. The gearing transmits torque from the motor to upper and lower drive wheels (5, 13). The gearing (4, 12) comprises toothed wheels with drive- (5, 13) and intermediate- (17) wheels.
申请公布号 DE10043213(C1) 申请公布日期 2002.03.07
申请号 DE20001043213 申请日期 2000.09.01
申请人 INFINEON TECHNOLOGIES AG 发明人 HUNGER, RUEDIGER
分类号 H01L21/00;(IPC1-7):H01L21/304;B08B1/04 主分类号 H01L21/00
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