发明名称 PROBE END CLEANING SHEET
摘要 To remove foreign matter without deforming the end of a probe, and prevent new foreign matter from adhering to the end of a probe. A probe end cleaning sheet for removing foreign matter adhered to the end of a probe 211, comprising a cleaning thin film 110 having fine abrasive powder applied on the surface, an elastic sheet 120 provided in a lower layer of the cleaning thin film 110 and having an elasticity, and a board 130 provided in a lower layer of the elastic sheet 120, in which the cleaning thin film 110 is made of a material which is dented when the end of the probe 211 is pressed with a specified load but is not torn by the end of the probe 211, and the elastic sheet 120 is made of a material which is dented in the pressed portion by the end of the probe 211 when the end of the probe 211 is pressed to the cleaning thin film 110 with the specified load.
申请公布号 US2002028641(A1) 申请公布日期 2002.03.07
申请号 US19990249858 申请日期 1999.02.16
申请人 OKUBO MASAO;NISHIZAKI SHUNICHIRO;KOZAKI SHINICHIRO;SAKATA TERUHISA 发明人 OKUBO MASAO;NISHIZAKI SHUNICHIRO;KOZAKI SHINICHIRO;SAKATA TERUHISA
分类号 G01R1/06;B24B29/04;B24D3/22;B24D11/00;G01R31/28;H01L21/66;(IPC1-7):B24B1/00 主分类号 G01R1/06
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