STRUCTURE FOR PREVENTING LEAKAGE OF MICROWAVE IN SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A structure for preventing a leakage of microwave in semiconductor fabricating equipment is provided to perform stably processes by preventing an error due to a leakage of microwave. CONSTITUTION: The first ring(R1) for preventing a leakage of microwave is installed in a combination portion between the first equipment(E1) and the second equipment(E2). The second ring(R2) for preventing the leakage of microwave is installed in a combination portion between the first equipment(E1) and the third equipment(E2). The first to the third equipment(E1-E3) are used for shifting microwave wavelengths. The first ring(R1) and the second ring(R2) can be formed with a cooper material. In addition, the first ring(R1) and the second ring(R2) can be formed with a mixture of the cooper and an asbestos.