| 摘要 |
PURPOSE: A field emission cold cathode device and its manufacturing method are provided to maintain high vacuum state to guarantee satisfying life time. CONSTITUTION: A field emission cold cathode device includes a getter(101) inserted into a groove(108) in an insulating layer(103) between emitters. As the getter(101), NEG(non-evaporable getter) is used in a groove(108). As an insulator under the getter(101), BPSG(Borophosphosilicate glass)(102) is used under the NEG. Then, a photo-sensitive resin is coated to form a mask pattern for making the groove(108). After mask patterning, the photo-sensitive resin is removed. The groove(108) is formed on the patterned mask by a Rie method. The BPSG is grown by a CVD(chemical vapor deposition) method to a top of SiO2(106). After growing the BPSG and thermal process smoothing, the NEG is used to form the getter(101).
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