METHOD FOR INSPECTING DEFECT WITH AUTOMATIC DEFECT TESTER

摘要

PURPOSE: An automatic defect inspection apparatus and an inspection method therewith are provided to examine defectiveness of an object having curved or coated surfaces regardless of interference of diffused reflection, and to improve accuracy of inspection by searching the object range automatically. CONSTITUTION: An object is distinguished from the background in deciding the object(S410). The image is obtained with a first lighting apparatus, and the inspection range is distinguished from the object to select the inspection range(S420). The object is photographed with a second lighting apparatus, and the luminosity of the inspection range is detected(S430). The defectiveness of the object is inspected with the object range stored in a memory and with inspection ranges by the lighting apparatus(S440). The image is obtained with using two lighting units, and combination image is compared with the standard image. The inspection area is automatically searched with analyzing the image within the inspection range.