MAGNETICALLY ACTUATED MICRO-ELECTRO-MECHANICAL APPARATUS AND METHOD OF MANUFACTURE
摘要
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
申请公布号
WO0218979(A2)
申请公布日期
2002.03.07
申请号
WO2001US26529
申请日期
2001.08.24
申请人
CORNING INTELLISENSE CORPORATION;BERNSTEIN, JONATHAN;TAYLOR, WILLIAM, P.;KIRKOS, GREGORY, A.;WAELTI, MARC
发明人
BERNSTEIN, JONATHAN;TAYLOR, WILLIAM, P.;KIRKOS, GREGORY, A.;WAELTI, MARC