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发明名称
Verfahren zum Entfernen mindestens eines organischen Stoffs von einer metallischen Oberfläche
摘要
申请公布号
DE19813235(C2)
申请公布日期
2002.03.07
申请号
DE19981013235
申请日期
1998.03.26
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH
发明人
LOEWE, HOLGER;KUEPPER, MICHAEL;SCHENK, RAINER
分类号
G03F7/42;(IPC1-7):C25F5/00
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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