发明名称 METHOD FOR FORMING IMAGE SENSOR CAPABLE OF INCREASING AREA OF PHOTODETECTING SURFACE
摘要 PURPOSE: A method for forming an image sensor capable of increasing the area of photodetecting surface is provided to increase an effective area of a photodiode in a pixel and to stably guarantee a saturation level of a complementary-metal-oxide-semiconductor(CMOS) image sensor, by simply changing a process without a variation of a design rule or micro lens. CONSTITUTION: An oxidation process is performed to form an isolation layer while a plurality of oxide layer patterns are formed on a semiconductor substrate in the photodetecting area. The oxide layer pattern in the photodetecting area is removed to form a flection on the semiconductor substrate. An ion implantation process is performed to form a photodetecting unit having a flection in the semiconductor substrate of the photodetecting area.
申请公布号 KR20020017739(A) 申请公布日期 2002.03.07
申请号 KR20000051251 申请日期 2000.08.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 OH, SE JUNG
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
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