| 摘要 |
<p>An apparatus for positioning a substrate relative to a substrate support member is provided. The apparatus comprises a lift hoop having a hoop key, the lift hoop disposed in moveable engagement with the substrate; and a lift shaft having a shaft key disposed in an interlocked arrangement with the hoop key. In one embodiment, the hoop key comprises two or more wedges extending from a surface of the lift hoop, and the shaft key comprises two or more mating wedges extending from a distal end of the lift shaft.</p> |
