ANGULAR VELOCITY SENSOR

摘要

An angular velocity sensor enhanced in detection characteristics by using a tuning fork vibrator consisting of a single-crystal piezoelectric material such as quartz. The sensor comprises two sheets of crystal oscillators (20, 30) directly joined for integration in a thickness direction so as to be oriented in a crystal-axis direction that generates mutually-reversed-polarity piezoelectric phenomena in their width direction, and includes a tuning fork vibrator (10) having two tuning fork arms (10a, 10b) and a tuning fork base (10c), wherein detecting electrodes (6, 7, 5, 8) are provided on the inner surfaces and the outer surfaces of both of the tuning fork arms (10a, 10b), and driving electrodes (1, 2) used for the detecting electrodes (5, 6, 7, 8) are provided at the tuning fork arms (10a, 10b) so as to cancel out capacitive coupling from the drive side to the detection side.