| 摘要 |
There is provided a semiconductor integrated circuit device comprising: a field placement creating a field pattern in an array form by closest packing on a first conductance-type semiconductor substrate, the field pattern including a plurality of memory cells which define an active area and a device isolation region of a field effect transistor, and which are arranged in a predetermined pitch in the longitudinal and transverse directions, respectively, each memory cell having a pattern of a certain length-to-width size; a cell plate placement providing a capacitor structure between a second conductance-type diffusion region formed by an impurity implant to the active area and a cell plate electrode formed so as to cover part of the active area with a predetermined cell plate pattern through a capacitor dielectric, the cell plate pattern extending in the transverse direction with a certain length size; and a word line placement in which a word line pattern is arranged in the transverse direction of a vacant zone of the active area in which the cell plate electrode is not formed and serves as a gate electrode of the field effect transistor on the active area, the word line pattern being formed through a gate oxide at a predetermined interval, wherein the layout of a cell array of the memory cells is provided by a closest packing cell configuration.
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