CARBON PLASMA PULSED SOURCE

摘要

The present invention relates to a carbon-plasma pulsed source for applying a diamond-like carbon coating on an article to be processed. The source includes an expendable graphite cathode and an anode which are arranged in the body of a vacuum chamber. In the plane directed towards the article to be processed, the expendable graphite cathode has a maximal size which is substantially equal to the maximal size of the article surface to be treated. The arc ignition system includes at least two ignition units arranged about the perimeter of the expendable graphite cathode in the immediate vicinity thereof. The longitudinal axis of each ignition unit is directed towards the corresponding area on the working surface of the expendable graphite cathode so as to trigger an electric discharge. The carbon-plasma pulsed source also includes an additional electrode, a first capacitor, a second capacitor as well as an adjustable induction cartridge ensuring the electric connection between the expendable graphite cathode and the capacitive accumulator.