发明名称 Sampling inspection managing system
摘要 In the sampling inspection managing system of the present invention, for each processing step, a setting is made on a processing flow table as to whether the processing step concerned is a step for determining the sampling inspection frequency of a specific inspection step, and for a processing step which is set as "being a step of determining the sampling inspection frequency", the inspection frequency of the specific inspection step is set on a sampling frequency setting table for every kind of product to be processed. Further, for the processing step, the processing number of lots is counted for every kind of product on a count table, and on the basis of the processing number thus counted, a judgment is made as to whether each lot is a lot to be inspected in the specific inspection step, and the judgment result is stored as information for the lot in a lot table. Accordingly, the inspection can be carried out at the inspection frequency suitable for the inspection purpose for every kind of product.
申请公布号 US2002029118(A1) 申请公布日期 2002.03.07
申请号 US20010792052 申请日期 2001.02.26
申请人 YANARU TAICHI;OKABE MASATAKA;OHTSUKA HIROFUMI 发明人 YANARU TAICHI;OKABE MASATAKA;OHTSUKA HIROFUMI
分类号 G01N37/00;G05B19/418;H01L21/02;H01L21/66;(IPC1-7):G06F19/00 主分类号 G01N37/00
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