Electronic switch used in a hydrogen sensor or temperature sensor comprises a substrate, an insulating material, and an electrode structure consisting of parallel electrodes forming an intermediate chamber

摘要

Electronic switch comprises: (i) a semiconducting or conducting substrate (1); (ii) an insulating material made of silicon dioxide or other insulating material applied on the substrate; and (iii) an electrode structure consisting of a pair of two parallel electrodes (3, 4) enclosing a rectangular intermediate chamber. The intermediate chamber is filled with a palladium layer (5) decreasing in thickness from one electrode to the other. Other geometrical arrangements are also possible, e.g. a circular inner electrode with an intermediate chamber and a second circular electrode enclosing the described region. An Independent claim is also included for a device for the production of an electronic switch. Preferred Features: The thickness of the palladium layer decreases according to a gauss profile or decreases linearly or constantly.