发明名称 STRIP DEVICE HAVING SLIT TYPE NOZZLE
摘要 PURPOSE: A strip device having a slit type nozzle is provided to spray a stripper solution to the entire surface of a substrate with a uniform pressure by forming a slit hole in a nozzle, thereby minimizing the spots generated in the process of inspection. CONSTITUTION: A strip device having a slit type nozzle includes a nozzle formed with slit holes(106) for uniformly spraying stripper solution on the entire surface of a substrate, and a solution supply source for supplying the stripper solution to the nozzle, wherein the slit hole has a length larger than a width of the substrate, and the nozzle includes a stripper charging pipe(104) to be supplied with the stripper solution from the solution supply source, and a housing(108) for guiding the stripper solution introduced from the stripper charging pipe to the slit holes.
申请公布号 KR20020017338(A) 申请公布日期 2002.03.07
申请号 KR20000050587 申请日期 2000.08.30
申请人 LG.PHILIPS LCD CO., LTD. 发明人 KIM, DO RYEON;OH, SE CHEOL
分类号 G02F1/13;(IPC1-7):G02F1/13 主分类号 G02F1/13
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